【三星已经部署了首台高数值孔径High-NA极紫外光刻设备】《科创板日报》7日讯，三星于今年3月安装了首台高数值孔径（High-NA）EUV（极紫外光刻）设备，用于1.4纳米芯片的生产。三星在开发并最终量产2纳米以下晶圆时，
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